Ion Implantation Technology - 94

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Ion Implantation Technology - 94

By Coffa, S.; Ferla, G.; Rimini, E.; Priolo, F.

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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.

The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

Subject: Professional, Career & Trade -> Electronics -> General

Ion Implantation Technology - 94
Publisher: Elsevier S & T 05/1995
Imprint: North Holland
Language: English

ISBN 10: 0444821945
ISBN 13: 9780444821942
Print ISBN: 9780444821942

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