Nonthermal Plasma Chemistry and Physics

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Nonthermal Plasma Chemistry and Physics

By Jurgen Meichsner

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In addition to introducing the basics of plasma physics, Nonthermal Plasma Chemistry and Physics is a comprehensive presentation of recent developments in the rapidly growing field of nonthermal plasma chemistry. The book offers a detailed discussion of the fundamentals of plasma chemical reactions and modeling, nonthermal plasma sources, relevant diagnostic techniques, and selected applications. Elucidating interconnections and trends, the book focuses on basic principles and illustrations across a broad field of applications. Expert contributors address environmental aspects of plasma chemistry. The book also includes selected plasma conditions and specific applications in volume plasma chemistry and treatment of material surfaces such as plasma etching in microelectronics, chemical modification of polymer surfaces and deposition of functional thin films. Designed for students of plasma physics, Nonthermal Plasma Chemistry and Physics is a concise resource also for specialists in this and related fields of research.

Subject: Physical & Earth Sciences -> Chemistry -> Physical Chemistry

Nonthermal Plasma Chemistry and Physics
1st edition
Publisher: CRC Press 11/13/12
Imprint: routledge
Language: English

ISBN 10: 1420059211
ISBN 13: 9781420059212
Print ISBN: 9781420059168

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