Silicides for VLSI Applications

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Silicides for VLSI Applications

By Murarka, Shyam P.

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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Subject: Physical & Earth Sciences -> Physics -> Integrated Sciences

Silicides for VLSI Applications
1st edition
Publisher: Elsevier S & T 06/1983
Imprint: Academic Press
Language: English
Length: 200 pages

ISBN 10: 0125112203
ISBN 13: 9780125112208
Print ISBN: 9780125112208

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